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G02200 - SEMI G22 - Specification for Ceramic Pin Grid Array Packages StdPbc-0314 SEMI M6 — Specification for

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Description

SEMI M6 — Specification for Silicon Wafers for Use as Photovoltaic Solar Cells

1  This Standard applies to manufacturing equipment that requires authentication and authorization for its services

SEMI C36-1106 (technical revision)

SEMI E172 — Specification for Secs Equipment Data Dictionary (SEDD)

This Document applies only to inert gases delivered through specialty gas systems at pressures up to 8 × 105 Pa (8 atmospheres)

G02200 - SEMI G22 - Specification for Ceramic Pin Grid Array Packages StdPbc-0314 SEMI M6 — Specification forThis specification defines the acceptance criteria for cofired ceramic pin grid array packages. Referenced SEMI Standards None.

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